Dr. Dennis Capitanio
Education:
- Ph.D. Physical Chemistry, Northeastern University, Boston, MA (1973)
- BS Chemistry, University of Massachusetts, Amherst, MA (1969)
Professional Societies:
- American Chemical Society (1969-Present)
Scientific Publications and Presentations:
-
Capitanio, Dennis, Mizuno, Yoshiki, and Lee, Joseph, “Metal Ion Removal in Photoresist Solvents”, Proceedings of SPIE Conference-Microlithography 99, Santa Clara, March 15, 1999.
-
Capitanio, Dennis, “Advantages to Point of Use Filtration of Photoresists in Reducing Contamination on the Wafer Surface”, ASMC98 Proceedings, pp. 247-251, September 23-25, 1998.
-
Capitanio, Dennis, Burke, Peter, Raeder, Christopher and Witt, Kevin, “Defect Reduction During Chemical Mechanical Planarization by Incorporation of Slurry Filtration”, Workshop in Contamination in Liquid Chemical Distribution Systems, SEMICON West, pp. H1-H11, July 12, 1998. (Published in A 2C 2, June 1999)
-
Capitanio, Dennis, “Filtration of Chemical Mechanical Polishing Slurries Used in the Semiconductor Industry”, CMP Users Group, Chemical Mechanical Polishing ’97 Proceedings, pp. 284-291, November 1997.
-
Molinaro, James and Capitanio, Dennis, “Evaluating the Performance of Dual PTFE Filter Assemblies in Hot-Acid Baths”, MICRO pp. 39-43, January 1997.
-
Korman, Robert and Capitanio, Dennis, “Distribution Systems for CMP: The New Challenge”, Journal of Electronic Materials, Vol. 25 (10), pp. 1608-1611, October 1996.
-
Korman, Robert, Capitanio, Dennis and Puccio, Anthony, “Upgrading a Bulk Chemical Distribution System to Meet Changing Demands”, MICRO pp. 37-41, April 1996.
-
Capitanio, Dennis, Connor, Patrick and O’Sullivan, Joseph, “Particulate Contamination Control in High Purity Water for the Semiconductor Industry”, Ultrapure Water, pp. 36-40, November 1993.
-
Capitanio, Dennis and Gotlinsky, Barry, “Methodology for Evaluating Particulate Control in Aggressive Chemicals for the Semiconductor Industry”, Proceedings of the 39 th Annual Technical Meeting, Institute of Environmental Sciences, pp. 218-224, 1993.
-
Gotlinsky, Barry, Connor, Patrick, Capitanio, Dennis, Johnson, Lawrence, and Tousi, Saied, “Testing of All-metal Filters for High Purity Semiconductor Process Gases”, Proceedings of the 37 th Annual Technical Meeting, Institute of Environmental Sciences, pp. 575-584, 1991.
-
Naqvi, K. Razi, Capitanio, Dennis, and van Willigen, Hans, “On the Mechanism of Eximer Formation in Triplet-Triplet Annihilation”, Chemical Physical Letters, Vol. 57(2), pp. 197-201, 15 July 1978.
-
Capitanio, Dennis and van Willigen, Hans, “Magnetic Field dependence of Monomer and Eximer Delayed Fluorescence of Aromatics in Fluid Solutions”, Chemical Physics Letters, Vol. 40(1), pp. 160-162, 15 May 1976.
-
Capitanio, DA, Pownall, HJ, and Huber, JR, “Spectroscopic and Photochemical Properties of Aromatic Thioketones: Xanthione”, Journal of Photochemistry, 3, pp. 225-236, (1974)